Final figures released by BARB give Planet of the Dead an official rating of 9.54 million viewers, making it the 5th most watched programme of the week.
Planet of the Dead is one of only eight episodes in the programme's long history to make the top five.
An additional 200,000 viewers watched the programme in High Definition on BBC HD as a simulcast with BBC1. This is the highest figure ever achieved by BBC HD.
The Sunday repeat on BBC3 was watched by 0.91 million viewers.